Introducing a turnkey solution for vacuum deposition, spin coating and device testing in an inert atmosphere.
Unique base plate design provides for multiple sources configured in an arc at the front of the base plate, providing enhanced film uniformity combined with easy source loading and replacement.
Stainless steel bell jar with viewport and sacrificial glass for easy clean-up of viewing area.
Pneumatic bell jar lift raises bell jar following refill from low moisture glovebox atmosphere.
Direct drive rotary work holder with adjustable height, tilt and rotation speed. Easy to view and reach platen allows for easy mask and substrate loading.
1-2% deposition uniformity across 4-5 inches.
Pump stack with 300l/sec turbo pump backed with Edwards RV-8 12 CFM direct drive roughing pump. Vacuum pressure routinely reaches 5 X 10-6 Torr.
Deposition rate and thickness monitor with slide out crystal drawer for easy crystal replacement.
Integrated touch screen controls with built in diagnostics for all glovebox, bell jar and evaporation functions. Including automatic pump, vent and built in diagnostics
Optional co-deposition functions available upon request
